Gas Scrubbers & Abatement in Bangladesh

EDIBON teaching and research units for the gas scrubbers & abatement laboratory, supplied, installed and commissioned in Bangladesh by Vvon with faculty training included. 15 units available.

15 products from 1 manufacturer: Semian.

Products

• MIDAS-I — Semian: Burn and wet local scrubber that treats process exhaust from semiconductor tools using an LNG fired combustion stage followed by water scrubbing. Up to four gas inlet ports feed one cabinet, which suits multi chamber tools in the sub fab.
• MIDAS-II — Semian: Electrically heated burn and wet scrubber for semiconductor process exhaust, using a 9.9 kW heater instead of a fuel gas supply. Cooling water and clean dry air connections are provided, and the cabinet takes up to two gas inlet ports.
• SBW 200-CE — Semian: Burn and wet scrubber rated for 400 SLM of total gas treatment, with a 6 kW heater stage followed by water scrubbing. Up to four NW40 inlet ports allow one unit to serve several process chambers, and waste water leaves through a VP40 PVC union.
• SBW 200-K — Semian: Burn and wet scrubber handling 300 SLM through two NW40 inlet ports, with a 6 kW heater and water scrubbing stage. At 350 kg and 800 by 700 mm it suits sub fab locations where cabinet space is limited, and it drains through a VP40 PVC union.
• SBW 200-C — Semian: Burn and wet scrubber rated for 400 SLM with an 8 kW heater stage and an NW80 exhaust connection. Single phase supply and a PVC union waste water drain make it straightforward to connect into existing fab utilities.
• SSW 200-E — Semian: Wet scrubber for water soluble process exhaust, drawing under 300 W and needing only water and nitrogen connections. The 400 by 500 mm footprint and 100A flange inlet suit point of use installation next to a process tool.
• SSW 200-K — Semian: Wet scrubber rated for 200 SLM with matched 65A flange inlet and outlet, so it drops into an existing exhaust run. Nitrogen supply is optional, power draw stays under 300 W and waste water leaves through a VP40 union at 200 kg installed weight.
• SSD 100-S — Semian: Chemisorption scrubber that passes process exhaust through a 100 litre canister of dry adsorbent media, with no water or heater required. An optional 5 litre bypass canister and outlet sampling port support breakthrough checking.
• SBD 200-S — Semian: Combined burn and dry scrubber rated for 400 SLM, pairing a heated reaction stage with a 100 litre adsorbent canister. City water, process cooling water and clean dry air connections are provided for multi chamber tool exhaust.
• SBW III_202_S — Semian: High capacity burn and wet scrubber handling 1200 SLM total flow with a heating chamber running at 800 to 850 degrees C. Hydrogen treatment is rated to 120 SLM, which suits epitaxy and other high hydrogen processes.
• ENVIRO-MATRIX Trinity — Semian: Point of use abatement system for PFC, SiF4 and acid gases from etch and CVD tools. A first water scrubber removes acid gases, a catalytic reactor breaks down the PFCs, and a second water scrubber removes the HF produced.
• ENVIRO-MATRIX Infinity — Semian: Point of use system combining a pyrophoric oxidation chamber with multistage wet scrubbing, for silicon nitride deposition and interlayer dielectric exhaust. Gases stay dry until the wet stage, which keeps the inlet port clear of deposits.
• ENVIRO-MATRIX Cyrus — Semian: Dry adsorption system that removes and concentrates highly toxic compounds such as arsine, phosphine and germane from semiconductor effluent. Media can also be specified for organic compounds, high molecular weight VOCs, acid gases and ammonia.
• ENVIRO-MATRIX Sentinel — Semian: Point of use wet scrubber range for semiconductor reactor effluent containing corrosive, toxic or reactive gases. It handles solids generating gases such as WF6, BCl3 and DCS, and is normally installed in the sub fab or cleanroom chase.
• ENVIRO-MATRIX Altair — Semian: Passive gas treatment device for semiconductor process tool effluent, working without fuel gas or other utilities. It draws room air through the existing scrubber or ventilation system, which keeps running cost and maintenance time low.

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