Brand: Semian | Category: Scientific & Laboratory Equipment
Dry adsorption system that removes and concentrates highly toxic compounds such as arsine, phosphine and germane from semiconductor effluent. Media can also be specified for organic compounds, high molecular weight VOCs, acid gases and ammonia.
| Parameter | Value |
|---|---|
| Inlet and outlet connection | 1.5 in KF 40 |
| Maximum inlet gas flow | up to 300 slm |
| Typical gas flow rate | 100 to 150 slm N2 |
| Maximum contaminant flow | 4 to 5% by volume in mixture |
| Canister dimensions | 12 in O.D. x 70 in tall |
| Specification | Single enclosure 32 in L x 32 in W x 92 in H, cabinet exhaust 300 cfm |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Semian.
Phone: +880 1711-738207 | Email: info@vvon.com.bd