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MIDAS-I

Brand: Semian | Category: Scientific & Laboratory Equipment

Burn and wet local scrubber that treats process exhaust from semiconductor tools using an LNG fired combustion stage followed by water scrubbing. Up to four gas inlet ports feed one cabinet, which suits multi chamber tools in the sub fab.

Technical Specifications

ParameterValue
Total gas treatment volume200 SLM
Gas inletNW40, 1 to 4 port
Gas exhaustNW63, 1 port, -25 to -75 mmH2O
Electrical power consumption2 kW
Voltage/phase208V 2~ 50/60Hz 10A
SpecificationDimensions 1050 (W) x 880 (D) x 1980 (H), weight 460 kg

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Get a Quote

Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Semian.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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