Brand: Semian | Category: Scientific & Laboratory Equipment
Burn and wet local scrubber that treats process exhaust from semiconductor tools using an LNG fired combustion stage followed by water scrubbing. Up to four gas inlet ports feed one cabinet, which suits multi chamber tools in the sub fab.
| Parameter | Value |
|---|---|
| Total gas treatment volume | 200 SLM |
| Gas inlet | NW40, 1 to 4 port |
| Gas exhaust | NW63, 1 port, -25 to -75 mmH2O |
| Electrical power consumption | 2 kW |
| Voltage/phase | 208V 2~ 50/60Hz 10A |
| Specification | Dimensions 1050 (W) x 880 (D) x 1980 (H), weight 460 kg |
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Contact Vvon Technologies Limited about Semian equipment requirements in Bangladesh.
Phone: +880 1711-738207 | Email: info@vvon.com.bd
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Electrically heated burn and wet scrubber for semiconductor process exhaust, using a 9.9 kW heater instead of a fuel gas supply. Cooling water and clean dry air connections are provided, and the cabinet takes up to two gas inlet ports.
Passive gas treatment device for semiconductor process tool effluent, working without fuel gas or other utilities. It draws room air through the existing scrubber or ventilation system, which keeps running cost and maintenance time low.
Burn and wet scrubber rated for 400 SLM of total gas treatment, with a 6 kW heater stage followed by water scrubbing. Up to four NW40 inlet ports allow one unit to serve several process chambers, and waste water leaves through a VP40 PVC union.