Brand: Semian | Category: Scientific & Laboratory Equipment
Burn and wet local scrubber that treats process exhaust from semiconductor tools using an LNG fired combustion stage followed by water scrubbing. Up to four gas inlet ports feed one cabinet, which suits multi chamber tools in the sub fab.
| Parameter | Value |
|---|---|
| Total gas treatment volume | 200 SLM |
| Gas inlet | NW40, 1 to 4 port |
| Gas exhaust | NW63, 1 port, -25 to -75 mmH2O |
| Electrical power consumption | 2 kW |
| Voltage/phase | 208V 2~ 50/60Hz 10A |
| Specification | Dimensions 1050 (W) x 880 (D) x 1980 (H), weight 460 kg |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Semian.
Phone: +880 1711-738207 | Email: info@vvon.com.bd