Brand: Semian | Category: Scientific & Laboratory Equipment
Point of use abatement system for PFC, SiF4 and acid gases from etch and CVD tools. A first water scrubber removes acid gases, a catalytic reactor breaks down the PFCs, and a second water scrubber removes the HF produced.
| Parameter | Value |
|---|---|
| Specification | Greater than 99.5% removal of SiF4 and acid gases in pre-scrubber |
| Specification | Greater than 95% destruction of PFCs in catalytic reactor |
| Specification | 99% removal of product HF in post scrubber |
| Capability | 4 chambers of 200 mm etch tool or 3 chambers of 300 mm etch tool |
| Specification | Flow rate 200 slpm, power less than 4 kW, water usage under 1 gpm |
| Specification | Dimensions 27 in D x 36 in W x 79 in H, catalyst life greater than 1 year |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Semian.
Phone: +880 1711-738207 | Email: info@vvon.com.bd