Brand: Semian | Category: Scientific & Laboratory Equipment
Point of use system combining a pyrophoric oxidation chamber with multistage wet scrubbing, for silicon nitride deposition and interlayer dielectric exhaust. Gases stay dry until the wet stage, which keeps the inlet port clear of deposits.
| Parameter | Value |
|---|---|
| Specification | Pyrophoric oxidation using compressed air or clean dry air |
| Specification | Eductor venturi stage removes particulate such as SiO2 |
| Specification | Countercurrent packed section absorbs water soluble gases |
| Specification | High efficiency mist eliminator on outlet |
| Specification | Zero pressure drop with negative inlet pressure |
| Specification | UL, SEMI S2 and CE compliant |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Semian.
Phone: +880 1711-738207 | Email: info@vvon.com.bd