Brand: Hitachi High-Tech | Category: Nanotechnology
The AZtec series gives the TM series tabletop microscopes a choice of EDS systems, with built-in detectors made by Oxford Instruments and an energy resolution of 129 eV (Mn-Ka) available in all classes. Hitachi list three configurations: AZtecOneXplore as standard, AZtecLiveOneXplore with the live EDS function, and AZtecLiveLite as the multi-featured analysis instrument. The TruMap feature separates multi element spectra and subtracts background in real time so that element maps are free of contamination from overlapping peaks, while pile-up correction and TruQ technologies support high throughput analysis. AZtecLiveLite adds large area mapping and particle analysis through a motorised stage.
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An etching tool for semiconductor failure analysis, thin film profiling and delayering. It combines ion beam etch, reactive ion beam etch and chemically assisted ion beam etch so that layers of mixed composition can be removed at matched rates.
Quantax75 is one of the EDS systems Hitachi offer with the TM4000 series tabletop microscopes, using a built-in detector made by Bruker Nano GmbH. Hitachi note that every detector in this range is of compact design and needs no liquid nitrogen. The system gives local spectra observation at specified points, high speed colourised X-ray mapping, a hypermap function that returns spot analysis, line analysis and mapping results from a single acquisition, and live deconvolution so that overlapping peaks are separated and mapped in real time.
A compact high vacuum system for low voltage resistive thermal evaporation and sputtering, sized to fit within 32 inches of bench width. It is used for high vacuum carbon coating, high resolution microscopy coatings and rotary shadowing, and is run from a touch screen interface.