Brand: Oxford Instruments | Category: Nanotechnology
A PlasmaPro 100 Cobra configuration set up for volume VCSEL manufacture. The process gives a clean mesa sidewall finish, controlled profile angle for critical dimension control and very low footing, working with either photoresist or a hard mask.
| Parameter | Value |
|---|---|
| System uptime | over 90% |
| Specification | Precise control of profile angle for critical dimension control |
| Specification | Etch process supported with photoresist and hard mask |
| Specification | Controlled by PTIQ software |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Oxford Instruments.
Phone: +880 1711-738207 | Email: info@vvon.com.bd