Brand: Moorfield Nanotechnology | Category: Nanotechnology
A wide area version of the benchtop nanoPVD sputtering platform for larger research substrates. It keeps RF and DC magnetron process flexibility while extending coverage to 8 inch substrates for photovoltaic, sensor and transparent conductive oxide work.
| Parameter | Value |
|---|---|
| Base pressure | 5x10-7 mbar |
| Maximum substrate size | 8 inch (200 mm) |
| Sputter sources | up to 2 x 2 inch water cooled magnetrons |
| Process gas inlets | up to 3 MFC controlled gases |
| Substrate heating | up to 500 deg C optional |
| Process control | industrial PLC with 7 inch HMI touchscreen |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Moorfield Nanotechnology.
Phone: +880 1711-738207 | Email: info@vvon.com.bd