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nanoPVD-S10A Benchtop PVD System

Brand: Moorfield Nanotechnology | Category: Nanotechnology

A compact benchtop RF and DC magnetron sputtering system for research laboratories and cleanrooms. It deposits metals, oxides, nitrides and multilayers on substrates up to 4 inches, with reactive and co-deposition options.

Technical Specifications

ParameterValue
Base pressure5x10-7 mbar
Sputter sourcesup to 3 x 2 inch water cooled magnetrons
Maximum substrate size4 inch (100 mm)
Process gas inletsup to 3 MFC controlled gases
SpecificationSubstrate heating up to 500 deg C optional, up to 600 deg C with 4-bulb configuration
Footprint800 x 500 x 550 mm

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Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Moorfield Nanotechnology.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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