Brand: Moorfield Nanotechnology | Category: Nanotechnology
A hybrid benchtop system that combines magnetron sputtering with thermal and low temperature evaporation in a single chamber. It suits multilayer thin films, hybrid device stacks, contacts and seed layers where the process route is not yet fixed.
| Parameter | Value |
|---|---|
| Base pressure | 5x10-7 mbar |
| Sputter sources | configurable water cooled magnetrons |
| Evaporation sources | TE1 plus LTE sources |
| Specification | Sputtering and evaporation in a single chamber |
| Maximum substrate size | 4 inch (100 mm) |
| Substrate heating | up to 500 deg C optional |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Moorfield Nanotechnology.
Phone: +880 1711-738207 | Email: info@vvon.com.bd