Brand: SUSS MicroTec | Category: Nanotechnology
A compact manual mask aligner for research and small volume production. It takes pieces from 5 by 5 mm up to 100 mm wafers, prints in soft, hard and vacuum contact, and also supports UV nanoimprint lithography on fragile materials.
| Parameter | Value |
|---|---|
| Substrate range | pieces from 5 x 5 mm up to 100 mm wafers |
| Substrate thickness | up to 4 mm |
| Resolution | from 2 µm down to less than 0.5 µm |
| Exposure modes | soft, hard and vacuum contact |
| Alignment | top-side or infrared, Singlefield or Splitfield microscope |
| Illumination | MO Exposure Optics with micro-lens plates |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for SUSS MicroTec.
Phone: +880 1711-738207 | Email: info@vvon.com.bd