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MA/BA Gen4 Series Mask and Bond Aligner

Brand: SUSS MicroTec | Category: Nanotechnology

A semi-automated mask aligner and imprint platform for contact and proximity lithography. It exposes photoresist through a physical mask and also runs UV nanoimprint, serving MEMS and NEMS, advanced packaging, micro-optics and compound semiconductor work in research and pilot production.

Technical Specifications

ParameterValue
Overlay accuracy0.5 µm with optional DirectAlign technology
Resolutiondown to 0.8 µm in hard, soft or vacuum contact
Alignmenttop-side, bottom-side and infrared
IlluminationMO Exposure Optics with telecentric illumination
VersionsMA/BA6 Gen4, MA/BA8 Gen4 and MA/BA Gen4 Pro
ImprintSMILE technology for standard to high-end imprint

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited, Bangladesh's authorised distributor for SUSS MicroTec.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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