Brand: Denton Vacuum | Category: Nanotechnology
An automated cluster front end for high volume manufacturing that can carry up to two cassette load locks and six coating chambers. A semiconductor grade robotic handler moves substrates between load lock and modules, so multiple layers can be deposited without breaking vacuum.
| Parameter | Value |
|---|---|
| Configuration | up to two cassette load locks and six coating chambers or modules |
| Module size | designed for 200 mm or 300 mm process modules |
| Compatible modules | Discovery sputter, Voyager PE-CVD, Infinity Biased Target Sputter and Infinity Ion Beam Etch |
| Options | dedicated sputter etch modules, dedicated metrology, pre-clean module, substrate conditioning |
| Software | ProcessPro-HV, SEMI E95 compliant, with data logging and charting |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Denton Vacuum.
Phone: +880 1711-738207 | Email: info@vvon.com.bd