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Phoenix LC

Brand: Denton Vacuum | Category: Nanotechnology

An in-line magnetron sputtering system for large area production, built around rectangular or round linear cathodes. An automated palletised conveyor carries substrates through the linear chambers, and both planar and three dimensional components can be processed.

Technical Specifications

ParameterValue
Substrate or pallet sizeup to GEN 3.5 glass, 600 mm x 720 mm
Power deliveryRF, AC, DC and pulsed DC magnetron sputtering
Cathodesplanar or cylindrical, width and length matched to the process
Automationin-line palletised conveyance system
OptionsDenton optical process control system or colour control system

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Denton Vacuum.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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