Brand: Oxford Instruments | Category: Nanotechnology
Unity is a combined backscattered electron and X-ray detector for the SEM. Both sensor types sit in one package directly beneath the pole piece, which raises X-ray sensitivity and removes the shadowing that affects conventional detectors on rough and unpolished samples.
| Parameter | Value |
|---|---|
| Spatial resolution | below 10 nm when combined with a high resolution FEG-SEM |
| Specification | X-ray detection sensitivity and speed improved by at least 10 times over conventional EDS |
| Specification | Acquires SE, BSE, BEX and EDS data simultaneously in the same scan |
| Specification | Entire 12 mm2 stub analysed in under 20 minutes |
| Specification | Dual X-ray sensors positioned above the sample to remove shadowing |
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