Brand: Renishaw | Category: Nanotechnology
Renishaw's RLU laser units bring the performance of a displacement interferometer together with the installation ease normally associated with tape and glass scale encoders. Supplied in single or dual axis form, an RLU contains a class 2 helium neon (HeNe) laser source, stabilisation electronics, a fibre optic launch and axis position feedback electronics, and it is combined with one or two RLD detector heads to make up an RLE system. The RLU10 holds laser frequency stability within ±50 ppb over any one hour period, which suits the majority of in air applications, while the RLU20 holds ±2 ppb over the same period for the majority of vacuum applications. Both units support velocities up to 2 m/s and a vacuum wavelength stability of ±0.1 ppm over three years.
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The RPI30 accepts differential analogue 1 Vpp sine and cosine signals, interpolates by 4096 and provides an output in parallel format with up to 36 bits of position data. Used with a double pass plane mirror interferometer system, whose sinusoid fundamental period is nominally 158 nm, this yields a least significant bit of 38.6 picometres at velocities up to 2 m/s. Active lissajous correction can be enabled to compensate for DC offset and AC mismatch coming from the laser encoder, improving the sub divisional error to ±0.1 nm at low velocities. Two axis position and status are carried over an LVTTL (3.0 V) compatible bus, and a diagnostics connection allows remote download and analysis.
The RLI20-P links a Renishaw laser encoder system to a Panasonic MINAS A5 series controller. It takes the 1 Vpp analogue quadrature signals from the laser encoder and passes them through a high speed interpolator before outputting an incremental position reading in RS485 format. The internal position update rate is 100 MHz and the sub divisional error contribution is quoted as ±0.5 nm.
The RSU10 accepts a 1 Vpp sine and cosine signal from an RLE system, interpolates by 16,384 and delivers a position reading through a USB port. That interpolation gives signal resolution down to 9.64 picometres at a velocity of 1 m/s. Measurement data works with Renishaw's established LaserXL and QuickViewXL calibration software, which suits users who need to view and analyse real time dynamic measurement data. A software development kit with a maximum update rate of 20 Hz is supplied with each unit, and a TPin trigger input lets data capture begin on receipt of an externally generated signal.