Brand: SUSS MicroTec | Category: Nanotechnology
A stamp fabrication tool that replicates working stamps for nanoimprint lithography on 300 mm substrates. UV and thermal stamp making sit in one frame, and the high UV irradiance shortens replication from hours to minutes with tight critical dimension control.
| Parameter | Value |
|---|---|
| Substrate size | 300 mm |
| Chuck flatness | down to 2 µm |
| UV intensity | up to 200 mW/cm2 |
| UV uniformity | better than ±5% |
| Modules | UV and thermal stamp fabrication, field upgradeable |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for SUSS MicroTec.
Phone: +880 1711-738207 | Email: info@vvon.com.bd