Brand: SUSS MicroTec | Category: Nanotechnology
An automated projection lithography scanner for advanced packaging on 300 mm and 200 mm wafers. Wynne-Dyson optics print 2 µm lines and spaces with a large depth of focus, and the stitchless full field scan removes step field size limits on the layout.
| Parameter | Value |
|---|---|
| Wafer sizes | 300 mm, with 200 mm optional |
| Resolution | 2/2 µm lines and spaces |
| Overlay accuracy | 1.0 µm or better |
| Substrates | silicon, glass and silicon carbide |
| Warpage handling | up to 2 mm bow |
| Die shift compensation | ±200 ppm |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for SUSS MicroTec.
Phone: +880 1711-738207 | Email: info@vvon.com.bd