Skip to main content

MiniLab 030 Compact Modular PVD System

Brand: Moorfield Nanotechnology | Category: Nanotechnology

A compact front loading modular vacuum deposition system built on a single rack. It covers magnetron sputtering, thermal, low temperature and e-beam evaporation for metals, dielectrics and organics, and offers a glovebox mating interface.

Technical Specifications

ParameterValue
Chamber volumeapproximately 30 litre class, 304L stainless steel
Substrate capacityup to 6 inch diameter
Source capacityup to 3 sputter sources or multiple evaporation sources
Footprintapproximately 590 x 590 mm single rack, double racks available
Pumpingturbomolecular pump with rotary or scroll backing pump, CF100 turbo port
SpecificationGlovebox mating interface or retrofit option, cleanroom compatible

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Moorfield Nanotechnology.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

Back to Nanotechnology