Brand: Moorfield Nanotechnology | Category: Nanotechnology
A modular PVD platform for advanced sputtering and multi-technique research. It takes up to four 3 inch sputter sources, e-beam and thermal evaporation, and supports load lock and dual chamber configurations on substrates up to 8 inches.
| Parameter | Value |
|---|---|
| Base pressure | 5x10-7 mbar |
| Maximum sputter sources | 4 x 3 inch |
| Maximum substrate size | 8 inch (200 mm) |
| Substrate heating | up to 800 deg C with SSIC heater |
| E-beam evaporation | Telemark 246 |
| Specification | Optional load lock for up to 8 substrates, dual chamber available |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Moorfield Nanotechnology.
Phone: +880 1711-738207 | Email: info@vvon.com.bd