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Voyager PE-CVD

Brand: Denton Vacuum | Category: Nanotechnology

A plasma enhanced chemical vapour deposition system focused on diamond-like carbon, able to coat flat wafers and three dimensional parts such as optical lenses. An optional chamber configuration allows metals to be co-sputtered during deposition to give metal doped DLC films.

Technical Specifications

ParameterValue
SourceRF capacitively coupled source for DLC coatings
Substrate sizesmall components up to 200 mm wafers
SpecificationOptional chamber configuration for co-sputtering metals during DLC deposition
ControlDenton ProcessPro system for automated and manual process control
SpecificationCompatible with all front end options including the Versa cluster architecture
Applicationsscratch-resistant displays, wear coatings, IR transparent protective films

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Denton Vacuum.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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