Brand: Denton Vacuum | Category: Nanotechnology
A closed loop control system for transition mode, high rate reactive sputtering of metal oxides and nitrides. It reads a plasma emission line in real time and adjusts the reactive gas setpoint to hold intensity constant, which avoids target poisoning and keeps deposition rates near metal mode.
| Parameter | Value |
|---|---|
| Control | closed loop feedback on a monitored plasma emission line |
| Function | automatically adjusts reactive gas setpoint to maintain constant intensity |
| Specification | Enables near-metal mode deposition rates for insulating films |
| Applications | high rate optical film deposition, process quality control, metallurgical research |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Denton Vacuum.
Phone: +880 1711-738207 | Email: info@vvon.com.bd