Brand: Moorfield Nanotechnology | Category: Nanotechnology
The highest capability MiniLab modular PVD platform, taking substrates up to 12 inches and up to five sputter sources. It adds nanoparticle sources, residual gas analysis, ion beam and beam assisted deposition for demanding research programmes.
| Parameter | Value |
|---|---|
| Base pressure | 5x10-7 mbar |
| Maximum substrate size | 12 inch (300 mm) |
| Maximum sputter sources | up to 5, or 6 as a special build |
| E-beam evaporation | Ferrotec 3 kW to 6 kW |
| Substrate heating | up to 800 deg C with SSIC heater |
| Other techniques | NPS, RGA, ion beam and beam assisted deposition |
Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Moorfield Nanotechnology.
Phone: +880 1711-738207 | Email: info@vvon.com.bd