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LineBeam

Brand: Coherent | Category: Scientific & Laboratory Equipment

LineBeam systems deliver line beam profiles for excimer laser annealing of low temperature polysilicon backplanes on large display substrates. Line lengths run from 750 mm to 1500 mm at 308 nm or 355 nm, with top hat profiles along both axes.

Technical Specifications

ParameterValue
Line length options750, 1000, 1300 and 1500 mm
Beam profile typetop-hat along both axes
Depth of focus+/-150 um at 750 mm, +/-120 um at 1000, 1300 and 1500 mm
Long axis homogeneity0.6 % (2 sigma)
Short axis homogeneity0.8 % (2 sigma)
Wavelength308 nm or 355 nm, panel sizes up to Gen 10.5

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Coherent.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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