Skip to main content

Integrity

Brand: Denton Vacuum | Category: Nanotechnology

A production evaporation system that runs both thermal and electron beam sources, configured for semiconductor, compound semiconductor and optical coating work. A temperature management system feeds a fluid cooled substrate stage, which supports small grain and textured films.

Technical Specifications

ParameterValue
Deposition technologiesthermal evaporation and e-beam evaporation
Substrate stagefluid cooled, with temperature management system
Process controlPID control of deposition rate
OptionsEndeavor RF ion source for ion assisted deposition
OptionsLambdaPro optical monitoring system integrated into the control system

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Denton Vacuum.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

Back to Nanotechnology