Skip to main content

Alphacen 300 Drive

Brand: Nanosurf | Category: Nanotechnology

An AFM metrology system for 300 mm wafers, aimed at Angstrom level surface roughness and dimensional measurement in semiconductor quality control. WaveMode photothermal off-resonance imaging raises the line rate while holding tip sharpness, and wafer edge and sidewall inspection is supported.

Technical Specifications

ParameterValue
Scan range100 um x 100 um
Sample stageprogrammable 300 mm x 300 mm
Wafer chucks300 mm and 200 mm
Line rateup to 15 Hz with WaveMode, against 1 Hz standard
Positioningsub-micron absolute accuracy
Automationautomatic wafer and cantilever alignment, KLARF file routines

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited, Bangladesh's authorised distributor for Nanosurf.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

Back to Nanotechnology