TRINITY PFC Abatement System

Brand: Semian | Category: Scientific & Laboratory

The Semian TRINITY is a complete, self-contained abatement system for PFCs (CF₄, C₂F₆, NF₃), SiF₄ and acid gas emissions from etch and CVD tools. It integrates two water scrubbers with a patented poison-resistant catalytic reactor, achieving >95% PFC destruction efficiency and >99.5% SiF₄ removal — meeting the most stringent environmental discharge regulations.

Technical Specifications

Parameter	Value
PFC destruction efficiency	>95% (CF₄, C₂F₆, NF₃)
SiF₄ removal	>99.5%
Treatment method	Catalytic oxidation + dual wet scrubbing
Catalyst	Poison-resistant proprietary catalyst
Target gases	PFCs, SiF₄, HF, acid gases
Compliance	SEMI S2, EPA PFC reduction guidelines

Key Features

• Patented poison-resistant catalytic reactor — long catalyst life
• Dual water scrubbers for complete acid gas removal
• >95% PFC destruction — meets EPA and SEMI environmental targets
• Self-contained skid — minimal installation footprint
• PLC control with OIT interface and remote monitoring
• Automatic water management and drain

Applications

• Etch tool PFC exhaust abatement (CF₄, C₂F₆, SF₆)
• CVD chamber clean exhaust (NF₃, C₂F₆)
• SiF₄ and HF removal from fluorine-based processes
• Environmental compliance for semiconductor fabs

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited — Bangladesh's authorised distributor for Semian.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

Back to Scientific & Laboratory