SSD 100-S Chemisorption Scrubber

Brand: Semian | Category: Scientific & Laboratory

The Semian SSD 100-S is a dry chemisorption scrubber using proprietary media to remove and neutralise toxic gas-phase contaminants including arsine (AsH₃), phosphine (PH₃) and germane (GeH₄). Its safe passive design includes bed-saturation detectors and an automatic inert purge system — ensuring safe media replacement without exposure to toxic residues.

Technical Specifications

Parameter	Value
Treatment method	Dry chemisorption
Target gases	AsH₃, PH₃, GeH₄ and similar hydrides
Removal efficiency	>99.9% for target hydrides
Bed saturation detection	Yes — automatic alarm
Purge system	Automatic inert gas purge
Compliance	SEMI S2 / S6

Key Features

• Passive dry design — no water, no combustion
• Proprietary chemisorption media for high-efficiency removal
• Bed-saturation detectors with automatic alarm
• Automatic inert purge for safe media replacement
• Compact footprint for point-of-use installation
• SEMI S2/S6 compliant

Applications

• Arsine (AsH₃) abatement from III-V semiconductor processes
• Phosphine (PH₃) removal from doping processes
• Germane (GeH₄) abatement from SiGe CVD
• Hydride gas safety in research laboratories

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited — Bangladesh's authorised distributor for Semian.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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