SENTINEL Series Wet Scrubbers

Brand: Semian | Category: Scientific & Laboratory

The Semian SENTINEL is a unique line of point-of-use wet scrubbers designed for highly corrosive, toxic and reactive semiconductor reactor effluents. An N₂-shielded inlet prevents water backstreaming into the process tool; the multiple-chamber design handles solids-generating gases such as WF₆, BCl₃ and DCS that would clog conventional scrubbers. Removal efficiency >99%.

Technical Specifications

Parameter	Value
Treatment method	Multi-chamber wet scrubbing
Inlet protection	N₂-shielded — prevents backstreaming
Target gases	WF₆, BCl₃, DCS, HCl, HF
Removal efficiency	>99%
Solids handling	Yes — multiple chamber design
Compliance	SEMI S2 / S6

Key Features

• N₂-shielded inlet — prevents water backstreaming into process tools
• Multiple chamber design handles solids-generating gases
• >99% removal efficiency for target gases
• Handles WF₆, BCl₃, DCS — gases that clog conventional scrubbers
• SEMI S2/S6 compliant

Applications

• Tungsten CVD exhaust (WF₆) abatement
• Metal etch exhaust (BCl₃, Cl₂) treatment
• DCS (SiH₂Cl₂) CVD exhaust scrubbing
• Highly corrosive semiconductor process exhaust

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited — Bangladesh's authorised distributor for Semian.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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