SBW III_202_S Burn-Wet Scrubber

Brand: Semian | Category: Scientific & Laboratory

The Semian SBW III_202_S is a third-generation burn-and-wet gas scrubber with 200 SLM capacity and an advanced combustion chamber. It handles pyrophoric, flammable and water-reactive gases from semiconductor etch and CVD processes with improved combustion efficiency and lower fuel gas consumption compared to previous generations.

Technical Specifications

Parameter	Value
Treatment volume	200 SLM
Generation	Third generation
Treatment method	Advanced burn + wet scrubbing
Removal efficiency	>99% for target gases
Power supply	3-phase 220 V / 60 Hz
Compliance	SEMI S2 / S6

Key Features

• Advanced combustion chamber — improved efficiency vs. previous generations
• Lower fuel gas consumption
• Handles pyrophoric and water-reactive gases
• 200 SLM capacity
• SEMI S2/S6 compliant

Applications

• Semiconductor etch tool exhaust (WF₆, BCl₃, DCS)
• CVD process exhaust (SiH₄, Si₂H₆)
• Pyrophoric and water-reactive gas abatement

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited — Bangladesh's authorised distributor for Semian.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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