SBD 200-S Burn-Dry Scrubber

Brand: Semian | Category: Scientific & Laboratory

The Semian SBD 200-S combines thermal oxidation and dry adsorption for treatment of pyrophoric, flammable and corrosive exhaust gases from CVD and etch process tools. The burn stage oxidizes pyrophoric and flammable species; the dry adsorption stage captures the resulting acid and particulate byproducts.

Technical Specifications

Parameter	Value
Treatment method	Thermal oxidation + dry adsorption
Treatment volume	200 SLM
Target gases	Pyrophoric, flammable, corrosive gases
Power supply	3-phase 220 V / 60 Hz
Compliance	SEMI S2 / S6

Key Features

• Dual-stage burn + dry adsorption treatment
• Handles pyrophoric gases safely without water
• No liquid waste generation
• SEMI S2/S6 compliant
• Compact sub-fab footprint

Applications

• CVD process tool exhaust (SiH₄, Si₂H₆, DCS)
• Etch process exhaust (WF₆, BCl₃)
• Pyrophoric gas abatement in semiconductor fabs

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited — Bangladesh's authorised distributor for Semian.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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