MIDAS-I Gas Scrubber

Brand: Semian | Category: Scientific & Laboratory

The Semian MIDAS-I is a compact burn-and-wet gas scrubber with a 200 SLM total gas treatment volume. It combines thermal oxidation (burn) and wet scrubbing stages to safely treat toxic, corrosive and flammable exhaust gases from semiconductor process tools and research laboratories before atmospheric discharge.

Technical Specifications

Parameter	Value
Treatment volume	200 SLM total
Gas inlets	Multiple
Treatment method	Burn + Wet scrubbing
Removal efficiency	>99% for target gases
Power supply	Single-phase 220 V / 60 Hz
Compliance	SEMI S2 / S6

Key Features

• Dual-stage burn + wet scrubbing for high removal efficiency
• Multiple gas inlets for multi-tool connection
• Compact footprint for sub-fab and lab installation
• SEMI S2/S6 compliant safety design
• Automatic water level control and drain

Applications

• Semiconductor CVD and etch tool exhaust abatement
• Research laboratory fume hood exhaust treatment
• Toxic gas (HF, Cl₂, NH₃, SiH₄) abatement
• Corrosive gas neutralization

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited — Bangladesh's authorised distributor for Semian.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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