INFINITY Pyrophoric Oxidation System

Brand: Semian | Category: Scientific & Laboratory

The Semian INFINITY is a combination pyrophoric oxidation chamber and multistage wet scrubbing system designed for silicon nitride deposition and ILD processes. Its non-clogging gas-water phase inlet prevents the solid particle build-up that plagues conventional scrubbers in these applications. Zero pressure drop design and PLC-based monitoring with OIT interface.

Technical Specifications

Parameter	Value
Treatment method	Pyrophoric oxidation + multistage wet scrubbing
Target processes	Silicon nitride deposition, ILD CVD
Inlet design	Non-clogging gas-water phase inlet
Pressure drop	Zero
Control	PLC with OIT interface
Compliance	SEMI S2 / S6

Key Features

• Non-clogging inlet design — eliminates solid particle build-up
• Zero pressure drop — no back-pressure on process tools
• Multistage wet scrubbing for complete removal
• PLC control with OIT interface
• Remote monitoring and alarm outputs
• SEMI S2/S6 compliant

Applications

• Silicon nitride (Si₃N₄) CVD exhaust abatement
• ILD (inter-layer dielectric) CVD exhaust
• Pyrophoric gas treatment in semiconductor fabs

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited — Bangladesh's authorised distributor for Semian.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

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