CYRUS Dry Adsorption System

Brand: Semian | Category: Scientific & Laboratory

The Semian CYRUS is a dry adsorption system using proprietary passive media to remove and concentrate dangerous compounds such as arsine (AsH₃), phosphine (PH₃) and germane (GeH₄). Available in single and dual configurations, it includes pressure-drop and breakthrough sensors for safe media management. Maximum inlet flow up to 300 slm.

Technical Specifications

Parameter	Value
Treatment method	Passive dry adsorption
Target gases	AsH₃, PH₃, GeH₄ and similar hydrides
Max inlet flow	Up to 300 slm
Configuration	Single or dual
Breakthrough detection	Yes — sensor included
Pressure drop sensor	Yes
Compliance	SEMI S2 / S6

Key Features

• Passive design — no power, no water, no combustion
• Up to 300 slm inlet flow capacity
• Single and dual configurations for redundancy
• Breakthrough and pressure-drop sensors for safe operation
• Proprietary media — high capacity and long service life
• SEMI S2/S6 compliant

Applications

• Arsine (AsH₃) abatement from III-V MBE and MOCVD
• Phosphine (PH₃) removal from ion implant and doping
• Germane (GeH₄) abatement from SiGe CVD
• Hydride safety in research and university labs

View on manufacturer website

Get a Quote

Contact Vvon Technologies Limited — Bangladesh's authorised distributor for Semian.

Phone: +880 1711-738207 | Email: info@vvon.com.bd

Back to Scientific & Laboratory